Motorized XY and Rotation Axes Alignment Stages

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These XY-theta stages are designed for XY-rotation axes configuration.

This series is surface treated to ensure durability and resilience.

It moves in XY-plane and rotates around the center of the rotary stage.

The terms alignment table or XY-rotation stage are often used interchangeably with XY-theta stage.

This stage requires a Motion Controller that can be ordered as a complete plug-and-play system with RS-232, USB, joystick, trackball, and keypad control.

Features

Compact
Hollow or Solid Structure
High Stiffness and High Precision
Size From 15 mm by 15 mm to 100 mm by 100 mm of Linear Travel
Super-Thin and Light-Weight
Pre-Pressurized the Special Cross-Roller Bearing
Can Be Applied to the Optic Checking Devices for Continuity

Applications

Semiconductor Equipment

Panel Lamination Machinery

Panel Film Laminating Machines

Print Screen and 3D Printing

CNC Equipment

Angular Glass Cutting & Grinding Equipment

Wafer Alignment Equipment

Exposure Equipment

Semiconductor Equipment

Vision Inspection

Laser Measurement and Inspection
Optical Measurement and Inspection
Precision Mechanical Positioning
Precision Mechanical Measurement and Inspection
Precision Positioning for High Accuracy Process Demand
High Precision CNC Machine
Production Process of LCD
Display Panel
Medical Equipment
Printing
Coating Equipment

	Series	Linear Stroke	Rotary Stroke	Rotary Table Diameter	Load (kg)
Motorized Three-axis XY Plane and Rotary Stage	XYR-15-60	+/-7.5 mm by +/-7.5 mm	360 Deg Continuous	60 mm	9 kg
Motorized Three-axis XY Plane and Rotary Stage	XYR-50-60	+/-25 mm by +/-25 mm	360 Deg Continuous	60 mm	30 kg
Motorized Three-axis XY Plane and Rotary Stage	XYR-50-100	+/-25 mm by +/-25 mm	360 Deg Continuous	100 mm	45 kg
Motorized Three-axis XY Plane and Rotary Stage	XYR-100-60	+/-50 mm by +/-50 mm	360 Deg Continuous	60 mm	30 kg
Motorized Three-axis XY Plane and Rotary Stage	XYR-100-100	+/-50 mm by +/-50 mm	360 Deg Continuous	100 mm	45 kg

Related Products

Motion Controllers

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