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XY-theta Alignment Stage

Home >  XY-theta Alignment Stages


Stepper Motor Driven XY-Rotary Alignment Stage, Rotary Stage Diameter: 60 mm

Stepper Motor Driven XY-Theta Alignment Stage  with Optical Encoder

Stepper Motor Driven XY-Theta Alignment Stage with Optical Encoder,

Rotary Stage Diameter: 60 mm
 

 

The XYR-15-60-01 and the XYR-15-60-04 Alignment Stages feature 15 mm (0.58 in.) of travel in both the X and Y axes and 360 degrees of continuous rotation on the rotary axis.

The new XY-Theta Alignment Stages are driven by Two Phase Stepper Motors featuring  0.25 micron resolution (20 Micro-steps per Step Motor Driver in use). The XYR-15-60-01 has knobs for manual adjustment and the XYR-15-60-04 has 500 Cycles-per-Revolution Quadrature Encoders for position verification.

The X and Y axes have 1 mm-per turn precision lead screws, V-groove crossed roller bearings, and limit switches at both ends.

The Theta (rotary) stage is 60 mm (2.362 in.) in diameter with four threaded holes for easy integration of tooling and fixtures, a 90:1 worm gear and precision bearing for smooth travel, and home switch.  The compact XYR Alignment stage has a total footprint of 238.0 mm by 238.0 mm (9.370 in. by 9.370 in.) and including the Theta stage is just 87 mm (3.425 in.) high.  

The typical applications include: Alignment, testing, inspection, scanning, laser drilling, machining, semiconductor handling, sampling, assembly, and optical applications in industrial, medical and research applications.

The XYR Alignment Stages can be ordered as complete plug-and-play systems with compatible Motion Controller with PC interface, joystick, and keypad from OES.

Part No.. Table
Diameter (mm)
Gear Ratio Range of Travel Load Capacity (kg) Weight
 (kg)
X Y θ X (mm) Y (mm) θ (Deg)
XYR-15-60-01 60 1 mm per Motor Revolution 1 mm per Motor Revolution 4 per Motor Revolution 15 15 360 Continuous 9 2.72

 

XY Plane

Structure Description

Range of Travel

15 mm X 15 mm

Table Diameter 60 mm
Actuator Type Lead Screw (1 mm per turn)
Travel Guide

Precision V-groove & Crossed Roller

X Motor

Y Motor

Rotary Motor

Two Phase Stepper Motor (1.8)

Typical Phase Resistance 3.8 Ohms, Bi-directional
Typical Phase Current 1 Amp
DB-9 Male Connector
Pin Assignment and Description
1,2,3,4,5 Not Connected
6 Stepper Motor Phase A+
7 Stepper Motor Phase A-
8 Stepper Motor Phase B+
9 Stepper Motor Phase B-
Base Material Aluminum Alloy
Surface Treatment Black Anodized
Load Capacity 9 kg

Typical Accuracy Description

Resolution 5microns (Full Step)
0.25 microns (20 Micro-steps per Step Motor Driver in use)
Repeatability +/- 1.5 microns
Positional Accuracy 5 microns

Accessories Description


Optical Encoder

 

 

Rotary axis

Structure Description

Range of Travel

360 degrees

Stage Diameter  60 mm
Gear Ratio 90:1
Drive Mechanism

Worm Gear

Travel Guide Bearing
Base Material Aluminum Alloy
Surface Treatment Black Anodized

Typical Accuracy

Resolution 0.002 degrees  (10 micro-steps per step)
Repeatability +/-0.01 degrees
Positional Accuracy 0.05 degrees
Maximum Speed with stepper motor 30 degrees per second
Maximum Speed with servo motor 90 degrees per second

Electrical Connection

Two-Phase Stepper Motor (1.8) Typical Phase Current: 0.67 Amps for XY axes, 1.0 Amp for Rotary axis

DB-9 Male Connector, X and Y axes

Pin No.

Description

1 +5 VDC for the Limit Sensors
2

CCW Limit Switch
The table moves away from the motor
The knob turns counter clockwise
Open Collector
Normally Open
Needs Pull up Resistor (typically 1000 Ohms)

3

CW Limit Switch
The table moves towards the motor
The knob turns clockwise
Open Collector
Normally Open
Needs Pull up Resistor (typically 1000 Ohms)

4 Return for+5 VDC
5 Not Connected
6 Stepper Motor Phase A+
7 Stepper Motor Phase A-
8 Stepper Motor Phase B+
9 Stepper Motor Phase B-

DB-9 Male Connector, Rotary axis

Pin No.

Description

1 +5 VDC Input
2 Not Connected
3 Not Connected
4 Common
5 HONE (INDEX) Signal
Open Collector
Normally Open
Needs Pull up Resistor (typically 1000 Ohms)
6 Stepper Motor Stepper Motor Phase A+
7 Stepper Motor Stepper Motor Phase A-
8 Stepper Motor Stepper Motor Phase B+
9 Stepper Motor Stepper Motor Phase B-

Stepper Motor Driven Mechanical Drawing - 60 mm 

 

 Ordering Information

Part No. Description Amount

XYR-15-60-01

Stepper Motor Driven XY-Rotary Alignment Stage, Range of Travel, X-axis 15 mm, Y-axis 15 mm, Rotary-axis 360 (Deg. Continuous) Click to Get a Quote
XYR-15-60-04 Stepper Motor Driven XY-Theta Alignment Stage  with 500 Cycles per Revolution Optical Encoder Mounted at the back of the Stepper Motor, Range of Travel, X-axis 15 mm, Y-axis 15 mm, Rotary-axis 360 (Deg. Continuous) Click to Get a Quote

Motion Controllers
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