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XY-theta Alignment Stage

Home > XY-theta Alignment Stages

 

 

The XYR-100-60 Motorized XY-theta Stage is a high resolution, low profile, high load capacity, horizontal stage that can be easily integrated into any current or future application.

The precision ground screws provide 1.968 in x 1.968 in (
+/-50 mm x +/-50 mm) of travel in XY plane with high resolution and repeatability. The theta (rotary) axis range of travel is +/-180 degrees.

Some applications for the three-axis alignment stage include: testing, inspection, assembly and sampling in a broad range of industrial, medical, semiconductor and research facilities.

The stage is equipped with stepper motors. The X and Y axes incorporate the positive and negative limit switches. The rotary stage incorporates a HOME (INDEX) switch.

The stage is also available with servo motor.

A solid core version is also available.

This stage requires a Motion Controller that can be ordered as a complete plug-and-play system with RS-232, USB, joystick, trackball, and keypad control.

Part No.. Table
Diameter (mm)
)Optional Aperture
Size (mm)
Gear Ratio Range of Travel Load Capacity (kg)
X Y θ X (mm) Y (mm) θ (Deg)
XYR-100-60-01 60 30 4 mm per Motor Revolution 4 mm per Motor Revolution 2° per Motor Revolution 100 100 360 Continuous 45

Type

XY Plane

Structure Description

Range of Travel

100 mm X 100 mm

Table Diameter 100 mm
Actuator Type Lead Screw (1 mm per turn)
Travel Guide

Precision V-groove & Crossed Roller

Motor Two Phase Stepper Motor (1.8°)
Base Material Aluminum Alloy
Surface Treatment Black Anodized
Load Capacity 45 kg

Typical Accuracy Description

Resolution 20 microns (Full Step)
1 microns (20 Micro-steps per Step Motor Driver in use)
Repeatability 2 microns
Positional Accuracy 10 microns

Accessories Description

Servo Motor

Optical Encoder

Type

Rotary axis

Structure Description

Range of Travel

360 degrees

Stage Diameter 100 mm
Through Hole Diameter 30 mm (Optional)
Gear Ratio 180:1
Drive Mechanism

Worm Gear

Travel Guide Bearing
   
Base Material Aluminum Alloy
Surface Treatment Black Anodized

Typical Accuracy

Resolution 0.001 degrees = 3.6 arcsec (10 Micro-steps per Step Motor Driver in use) 
   
Maximum Speed with Stepper Motor 12 degrees per second
Maximum Speed with Servo Motor 45 degrees per second 
Positional Accuracy 0.05 degrees
Repeatability +/-0.01 degrees

Electrical Connection

Two-Phase Stepper Motor (1.8°) Typical Phase Current: 1.0 Amp

DB-9 Male Connector, X and Y axes

Pin No.

Description

1 +5 VDC for the Limit Sensors
2

CCW Limit Switch
The table moves away from the motor
The knob turns counter clockwise
Open Collector
Normally Open
Needs Pull up Resistor (typically 1000 Ohms)

3

CW Limit Switch
The table moves towards the motor
The knob turns clockwise
Open Collector
Normally Open
Needs Pull up Resistor (typically 1000 Ohms)

4 Return for+5 VDC
5 Not Connected
6 Stepper Motor Phase A+
7 Stepper Motor Phase A-
8 Stepper Motor Phase B+
9 Stepper Motor Phase B-

DB-9 Male Connector, Rotary axis

Pin No.

Description

1 +5 VDC Input
2 Not Connected
3 Not Connected
4 Common
5 HONE (INDEX) Signal
Open Collector
Normally Open
Needs Pull up Resistor (typically 1000 Ohms)
6 Stepper Motor Stepper Motor Phase A+
7 Stepper Motor Stepper Motor Phase A-
8 Stepper Motor Stepper Motor Phase B+
9 Stepper Motor Stepper Motor Phase B-

 

Stepper Motor Driven Mechanical Drawing - 100 mm

 

 Ordering Information

Part No. Description Amount

XYR-100-60-01

Stepper Motor Driven XY-Rotary Alignment Stage, Range of Travel, X-axis 100 mm, Y-axis 100 mm, Rotary-axis 360 (Deg. Continuous), Table Diameter 60 mm Click to Get a Quote
XYR-100-60-02 Three Phase Brushless Servo Motor with Quadrature Incremental Optical Encoder Driven XY-Rotary Alignment Stage, Range of Travel, X-axis 100 mm, Y-axis 100 mm, Rotary-axis 360 (Deg. Continuous), Table Diameter 60 mm Click to Get a Quote
XYR-100-60-03 DC Servo Motor with Quadrature Incremental Optical Encoder Driven XY-Rotary Alignment Stage, Range of Travel, X-axis 100 mm, Y-axis 100 mm, Rotary-axis 360 (Deg. Continuous), Table Diameter 60 mm Click to Get a Quote
XYR-100-60-04 Stepper Motor Driven XY-Rotary Alignment Stage  with 500 Cycles per Revolution Optical Encoder Mounted at the back of the Stepper Motor, Range of Travel, X-axis 100 mm, Y-axis 100 mm, Rotary-axis 360 (Deg. Continuous), Table Diameter 60 mm Click to Get a Quote

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