XY-axis positioning is made of stainless steel without
The stage size is 80 x 80 mm.
The Range of Travel is 30 mm.
The Load Capacity is 14 kg.
resolution is 1 microns / 0.5 microns with 10 / 20
micro-steps per step motor driver.
The typical repeatability accuracy is ± 1 microns.
The typical positioning accuracy is 5 microns.
The maximum speed is 40 mm / sec.