XY-axis positioning is made of stainless steel with cover.
The stage size is 80 x 80 mm.
The Range of Travel is 75 mm.
The Load Capacity is 14 kg.
The resolution is 10 microns / 5 microns .
The typical repeatability accuracy is ± 2 microns.
The typical positioning accuracy is 25 microns.
The maximum speed is 20 mm / sec.