This XYZ three-axis positioning is made of aluminum alloy.
The stage size is 40 x 40 mm.
The Range of Travel is 30 mm.
The Load Capacity is
is 0.2 microns / 0.1 microns with 10 / 20 micro-step per step
The typical repeatability accuracy is ±0.5 microns.
The typical positioning accuracy is 5 microns.
The maximum speed is 10 mm / sec.